Inductor energy loss reduction techniques
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAndrew Yeh, Alex Chang, Sung-Pi Tseng, Chang-Yun Chang, Hao-Yun Chen, Fu-Liang Yang
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Abstract
An inductive device including an inductor coil located over a substrate, at least one electrically insulating layer interposing the inductor coil and the substrate, and a plurality of current interrupters each extending into the substrate, wherein a first aggregate outer boundary of the plurality of current interrupters substantially encompasses a second aggregate outer boundary of the inductor coil.
Claims33
An inductive device, comprising:
- an inductor coil located over a substrate;
- at least one insulating layer interposing the inductor coil and the substrate;
- and
- a plurality of current interrupters each defined in a metal layer interposing the at least one insulating layer and the inductor coil, wherein each of the plurality of current interrupters are surrounded by electrically insulating material.
An inductive device, comprising:
- an inductor coil located over a substrate;
- at least one electrically insulating layer interposing the inductor coil and the substrate;
- and
- a plurality of current interrupters each extending into the substrate, wherein a first aggregate outer boundary of the plurality of current interrupters substantially encompasses a second aggregate outer boundary of the inductor coil.
A method of manufacturing an inductor device, comprising:
- forming a plurality of trenches in a substrate;
- filling at least partially each of the plurality of trenches;
- forming at least one insulating layer over the substrate, including over the plurality of trenches;
- and
- forming an inductor coil over the insulating layer, the inductor coil having a first aggregate outer boundary substantially encompassed by a second aggregate outer boundary of the plurality of trenches.
An inductive device, comprising:
- an inductor coil located over a substrate;
- at least one insulating layer located between the inductor coil and the substrate;
- and
- a plurality of current interrupters each extending into the substrate, wherein the plurality of current interrupters has a radial spoke configuration.
Dependencies are inferred from the claim text.