Zirconia toughened alumina ESD safe ceramic composition, component, and methods for making same

An ESD safe ceramic component formed of a sintered composition comprising:

• a base material of a zirconia toughened alumina, comprising a primary component of Al2O3 and a security component comprising ZrO2, comprises tetragonal ZrO2, wherein the primary component of the base material is present in an amount greater than the secondary component;
• and
• a resistivity modifier to reduce an electrical resistivity of the base material, the resistivity modifier comprising a transition metal oxide in an amount within a range of about 5 to about 40 volume % with respect to the base material,
• wherein the component has a volume resistivity within a range of about 105 to about 1011 ohm-cm.

An ESD safe ceramic bonding tool formed from a sintered composition comprising:

• a base material of a zirconia toughened alumina, comprising a primary component of Al2O3 and a secondary component comprising ZrO2, wherein the ZrO2 comprises tetragonal ZrO2, wherein the primary component of the base material is present in an amount greater than the secondary component;
• and
• a resistivity modifier to reduce an electrical resistivity of the base material, the resistivity modifier comprising a transition metal oxide, wherein
• the tool has a density not less than 98% of theoretical density, a volume resistivity within a range of about 106 to about 109 ohm-cm.