Magnetic recording medium and magnetic memory apparatus
AssigneeHitachi, Ltd.
InventorsKenchi Ito, Jun Hayakawa
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Abstract
Disclosed is a magnetic memory apparatus which comprises a patterned magnetic recording medium in which multilayered films each having a first magnetic layer, a nonmagnetic metal layer or a nonmagnetic insulating layer and a second magnetic layer deposited discretely on a conductive electrode layer formed on a substrate, and a cantilever array having a plurality of cantilevers each having a conductive chip at its distal end. This provides a magnetic solid memory apparatus that has a large memory capacity and a super fast transfer rate, the merits of a hard disk apparatus, and a nanostructure and low power consumption, which are the merits of a semiconductor memory.
Claims1
A method of fabricating a patterned magnetic recording medium in which nanostructures each comprising a multilayered film are surrounded by inorganic insulators in such a way as to be laid out apart from one another at substantially even pitches and are provided on a substrate by performing, in order:
- forming a multilayered film showing a tunneling magnetoresistance effect or a multilayered film showing a giant magnetoresistance effect;
- forming a resist pattern on said multilayered film;
- etching said multilayered film using said resist pattern as a mask;
- removing said resist pattern;
- forming an inorganic insulating film on said etched multilayered film;
- planarizing said inorganic insulating film by chemical mechanical polishing (CMP);
- and
- wherein forming said resist pattern includes using a die in which a predetermined pattern is formed in advance on another substrate different from the one on which said resist pattern is formed.
Dependencies are inferred from the claim text.