Method and apparatus for microarray fabrication
AssigneeAgilent Technologies, Inc.
InventorsEric M. Leproust, Lalitha Reddy, Michel G M Perbost
Life of this patent
Estimating the term…
Abstract
The invention provides a method and apparatus for micro array fabrication exclusive from the impact of a gas. A housing with a gas free chamber provides for improved micro array fabrication with a lower defect rate. The invention provides a housing that excludes a gas such as ozone to prevent interaction with probe construction or attachment. A method of fabricating a micro array in an ozone free environment is also disclosed.
Claims14
A method, comprising:
- removing ozone from an environment by filtration to provide an ozone-reduced environment;
- and
- fabricating a micro array in said ozone-reduced environment.
A method for fabricating a micro array, comprising:
- in an ozone-filtered environment:
- (a) depositing a first polymer on a substrate surface;
- (b) depositing a second polymer on said first polymer;
- (c) drying said polymers;
- and
- (d) curing said polymers to attach them to said substrate surface.
A method for fabricating a micro array, comprising:
- (a) depositing a first polymer on a substrate surface;
- (b) depositing a monomer stepwise on said polymer to produce a second polymer;
- and
- (c) deprotecting said second polymer in an ozone-filtered environment.
A method for fabricating a micro array on a substrate surface, comprising:
- (a) coupling an activated selected nucleoside through a phosphite linkage to said substrate surface to form a substrate bound nucleoside;
- (b) protecting unreacted hydroxyl groups on said substrate bound nucleoside;
- (c) oxidizing said phosphite linkage to form a phosphate linkage;
- and
- (d) deprotecting said substrate bound nucleoside to generate a reactive site in an ozone-filtered environment.
A method comprising:
- creating an ozone-reduced environment by filtration;
- and
- fabricating a micro array in said ozone-reduced environment.
A method, comprising:
- removing ozone from an environment by filtration to provide an ozone-reduced environment, wherein said ozone reduced environment is produced by filtering an atmosphere comprising a gas selected from the group consisting of:
- ozone, carbon dioxide, carbon monoxide, hydrogen, helium, neon, xenon, chlorine, fluorine, oxygen, and argon through a carbon filter;
- and
- fabricating a micro array in said ozone-reduced environment.
Dependencies are inferred from the claim text.