Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces

An apparatus for processing a microelectronic substrate comprising:

• a support member configured to carry a microfeature workpiece at a workpiece plane;
• a vessel having a generally continuous, convex curved vessel surface facing toward the support member and positioned to carry a processing liquid;
• and
• a plurality of electrodes positioned to be in fluid communication with the vessel and the workpiece plane, wherein at least a first one of the plurality of electrodes is coupleable to a source of electrical current at a first polarity and at least a second one of the plurality of electrodes is coupleable to a source of electrical current at a second polarity opposite from the first polarity.

An apparatus for processing a microfeature workpiece, comprising:

• support means for carrying the microfeature workpiece at a workpiece plane;
• vessel means having a generally continuous, convex curved surface facing toward the support means, the surface extending outwardly relative to a vessel axis, wherein for each of a plurality of points on the surface, a first distance between the point and the workpiece plane is proportional to a second distance between the point and the vessel axis, raised to a non-zero;
• and
• a plurality of electrodes positioned at least proximate to the vessel means, the electrodes being in fluid communication with the workpiece plane.

An apparatus for processing microfeature workpieces, comprising:

• an input/output station positioned to receive microfeature workpieces;
• and
• a processing station including:
• a support member configured to carry a microfeature workpiece at a workpiece plane;
• a vessel having a generally continuous, convex curved vessel surface facing toward the support member, the vessel surface extending outwardly relative to a vessel axis, wherein for each of a plurality of points on the vessel surface, a first distance between the point and the workpiece plane is proportional to a second distance between the point and the vessel axis, raised to a non-zero power;
• and
• a plurality of electrodes positioned at least proximate to the vessel, the electrodes being positioned to be in fluid communication with the workpiece plane, wherein at least a first one of the electrodes is coupleable to a source of current at a first polarity and at least a second one of the electrodes is coupleable to a source of current at a second polarity opposite the first polarity.

An apparatus for processing a microfeature workpiece, comprising:

• a support member configured to carry a microfeature workpiece at a workpiece plane;
• a vessel having a generally continuous, convex curved vessel surface facing toward the support member the curved vessel surface providing an at least approximately uniform current density at the workpiece plane;
• and
• at least one electrode disposed within the vessel and coupleable to a source of electrical current.

An apparatus for processing a microfeature workpiece, comprising:

• a support member configured to carry a microfeature workpiece at a workpiece plane;
• a contact positioned in electrical communication with the workpiece plane;
• a vessel having a generally continuous, convex curved vessel surface facing at least partially toward the support member, at least a portion of the vessel surface being movable relative to the support member while the support member carries a microfeature workpiece;
• and
• a plurality of electrodes spaced apart from the workpiece plane and positioned in fluid communication with the workpiece plane, the plurality of electrodes being coupleable to at least one source of electrical potential.

A method for forming a vessel for electrolytic processing, comprising:

• providing a support member to carry a microfeature workpiece at a workpiece plane;
• forming a vessel having a generally continuous, convex curved vessel surface extending outwardly relative to a vessel axis, wherein for each of a plurality of points on the vessel surface, a first distance between the point and the workpiece plane is proportional to a second distance between the point and the vessel axis, raised to a non-zero;
• and
• positioning a plurality of electrodes in fluid communication with the workpiece plane.