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US 7,247,188 B2Granted
Particle producing method and particle producing apparatus
AssigneeKabushiki Kaisha Toshiba
InventorIsao Matsui
Life of this patent
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Abstract
A particle producing apparatus includes a reaction container, an introduction portion for introducing a source gas and a reaction inhibitor generating gas into the reaction container, an inert gas introduction portion for introducing a carrier gas into the reaction container, a heater provided on the reaction container, and an exhaust portion. The growth of particles is controlled using a particle producing reaction and a reverse reaction.
Claims15
A particle producing method comprising:
- introducing a carrier gas into a reaction container;
- heating an inside of the reaction container;
- and
- introducing a source gas and a reaction inhibitor generating gas into the reaction container,
- wherein the source gas produces particles in the reaction container by a thermal decomposition reaction, and
- wherein the reaction inhibitor generating gas produces an inhibition component, which inhibits the thermal decomposition reaction with the particles used as a catalyst.
3 more elements
A particle producing method comprising:
- pyrolyzing a source gas to produce particles;
- and
- producing an inhibition component, which inhibits the pyrolyzing, from a reaction inhibitor generating gas with the produced particles used as a catalyst, wherein the reaction inhibitor generating gas includes hydrogen and carbon dioxide.
Dependencies are inferred from the claim text.