US 7,247,081 B2Granted

Precision machining apparatus and precision machining method

AssigneeToyoda Jidosha Kabushiki Kaisha

InventorsSumio Kamiya, Hisao Iwase, Tetsuya Nagaike, Hiroshi Eda, Libo Zhou

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Abstract

A precision machining apparatus and a precision machining method capable of carrying out grinding with accuracy by performing switching control, for example, on a device for rotating a grinding wheel according to grinding stages through the amount of movement and constant pressure changed stepwise. To a second pedestal 3 supporting a rotary device 6b for rotating a grinding wheel b, an actuator 5 and a feed screw mechanism 4 constituted by at least a feed screw 41 and a nut 42 are attached. In a rough grinding stage, the movement of the rotary device 6b and the second pedestal 3 is adjusted through a predetermined amount of movement of the nut 42. In a super-precision grinding stage, the movement of the rotary device 6b and the second pedestal 3 is adjusted by pressure control using stepwise a plurality of pneumatic actuators 5a, 5b differing in pressure performance. An attitude control device 7 is interposed between a first pedestal 2 and a rotary device 6a for rotating an object a to be ground.

Claims9

Dependent claims

A precision machining apparatus comprising:

a first rotary device for rotating an object to be ground;
a first pedestal supporting the first rotary device;
a second rotary device for rotating a grinding wheel;
a second pedestal supporting the second rotary device for rotating the grinding wheel;
movement adjustment means provided at the first pedestal and/or the second pedestal, the movement adjustment means being capable of moving one of the pedestals toward the other,
wherein the movement adjustment means includes a first movement adjusting portion which moves the first or second pedestal and a second movement adjusting portion which applies a pressure to the first or second pedestal to cause the first or second pedestal to move in the direction of the movement, and wherein the amount of movement of the first or second pedestal and the first or second rotary device can be controlled by selectively using the first movement adjusting portion and the second movement adjusting portion;
and
an attitude control device interposed between the first rotary device and the first pedestal or between the second rotary device and the second pedestal, wherein the attitude control device controls the attitude of the first or second rotary device.

5 more elements

A precision machining apparatus comprising:

a first rotary device for rotating an object to be ground;
a first pedestal supporting the first rotary device;
a second rotary device for rotating a grinding wheel;
a second pedestal supporting the second rotary device for rotating the grinding wheel;
movement adjustment means provided at the first pedestal and/or the second pedestal, the movement adjustment means being capable of moving one of the pedestals toward the other;
wherein the movement adjustment means includes a first movement adjusting portion which moves the first or second pedestal and a second movement adjusting portion which applies a pressure to the first or second pedestal to cause the first or second pedestal to move in the direction of the movement, and wherein the amount of movement of the first or second pedestal and the first or second rotary device can be controlled by selectively using the first movement adjusting portion and the second movement adjusting portion;
and
an attitude control device interposed between the first rotary device and the first pedestal or between the second rotary device and the second pedestal, the attitude control device controlling the attitude of the first or second rotary device, wherein the attitude control device includes a first flat-plate member extending in a plane defined by an X-axis and a Y-axis and a second flat-plate member disposed in parallel with the first flat-plate member while being spaced apart from the same;
recesses are formed in surfaces of the two flat-plate members facing each other;
a spherical member is interposed between the first flat-plate member and the second flat-plate member by fitting portions of the spherical member in the recesses;
a first actuator expandable in a Z-axis direction perpendicular to the plane defined by the X-axis and the Y-axis is interposed between the first flat-plate member and the second flat-plate member;
a second actuator expandable in a suitable direction in the plane defined by the X-axis and the Y-axis is connected to the second flat-plate member;
the second flat-plate member is movable relative to the first flat-plate member while being in an attitude with an object mounted thereon;
the spherical member is bonded to the first flat-plate member and/or the second flat-plate member by an adhesive elastically deformable;
and a piezoelectric element and a super-magnetostrictive element are provided in each of the first actuator and the second actuator.

12 more elements

Dependencies are inferred from the claim text.

Facts

Application: 11/316,886Filed 27 Dec 2005
Priority: JP 2004-38078228 Dec 2004
Published: US 2006/0194510 A131 Aug 2006
Granted: 24 Jul 2007
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

B24B 49/16
Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring…
B24B 7/228
For grinding inorganic material, e.g. stone, ceramics, porcelain: for grinding thin, brittle parts, e.g. semiconductors, wafers
B24B 37/30
Work carriers: for single side lapping of plane surfaces
B24B
Machines, devices, or processes for grinding or polishing