Method for the production of a facetted mirror
AssigneeCarl Zeiss SMT GmbH
InventorsAndreas Seifert, Markus Weiss, Andreas Heisler, Stefan Dornheim
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AssigneeCarl Zeiss SMT GmbH
InventorsAndreas Seifert, Markus Weiss, Andreas Heisler, Stefan Dornheim
Estimating the term…
In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12′, which have mirror surfaces 15 and are fitted into reception bores 22, 22′ of a support plate 16, the mirror facets 12, 12′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.
A facetted mirror having a plurality of mirror facets which generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, the mirror facet or the support plate having reprocessing faces for the alignment of at least one mirror surface.
Dependencies are inferred from the claim text.