Method for manufacturing a comb teeth type piezoelectric actuator

A method for manufacturing a comb-shaped piezoelectric actuator in which a plurality of piezoelectric actuators, each comprising a plurality of piezoelectric layers, are aligned and allocated in the shape of comb teeth, said method comprising the steps of:

• in a first processing step, forming electrode films on a plurality of piezoelectric material green sheets and forming slit apertures on a first piezoelectric material green sheet among the plurality of piezoelectric material green sheets using a punch and a die;
• in a second processing step, pulling the first piezoelectric material green sheet using a stripper;
• in a third processing step, pulling up a top portion of the punch to the extent that the top portion of the punch is pulled in slightly from the lowest portion of the pulled up first piezoelectric material green sheet;
• in a fourth processing step, forming second slit apertures in a second piezoelectric material green sheet using the punch;
• in a fifth processing step, pulling up the second piezoelectric material green sheet together with the first piezoelectric material green sheet;
• and
• in a sixth processing step, pulling up the top portion of the punch to the extent that the top portion of the punch is pulled in slightly from the lowest portion of the pulled up second piezoelectric material green sheet, laminating the plurality of the piezoelectric material green sheets by repeating the fourth to the sixth processing steps to form a plurality of piezoelectric layers having a comb teeth shape, and then firing the plurality of piezoelectric layers having the comb teeth shape to form the comb-shaped piezoelectric actuator.