Method of manufacturing color filter substrate, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus

A method of manufacturing an electro-optical device including different types of electro-optical layers in a predetermined pattern, the method comprising:

• a partition wall portion formation step of forming on a substrate a first partition wall portion having a first opening defining a region in which the electro-optical layers are formed and a second partition wall portion located on the first partition wall portion and having a second opening defining the region in which the electro-optical layers are formed;
• and
• an ejection step of ejecting liquid substances for the openings of the partition wall portions by using a liquid droplet ejecting method, the liquid substances being made by dissolving or dispersing functional materials composing the respective electro-optical layers in solvents,
• wherein the ejected liquid substances have different viscosities for each electro-optical layer, and
• wherein, in the partition wall portion formation step, the first partition wall portion projects from an inner surface of the second opening of the second partition wall portion, a surface area of a portion of the first partition wall portion projecting from the second partition wall portion becomes relatively small in an opening through which the liquid substance having relatively low viscosity is ejected, and the surface area of the portion of the first partition wall portion projecting from the second partition wall portion becomes relatively large in an opening through which the liquid substance having relatively high viscosity is ejected.