Ultra-precision positioning system
OwnerHeui-Jae Pahk, Jong-Ho Parkinventors
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Abstract
Provided is an ultra-precision positioning system. The system comprises a base, a motion stage movably provided to the top of the base, and first to sixth feeding mechanisms for moving the motion stage to have six degrees of freedom. The first to sixth feed mechanisms are fixed to the base and the motion stage, respectively. Each of the first to third feeding mechanisms has a piezo actuator and two elastic hinges provided at both sides of the piezo actuator. Each of the fourth to sixth feeding mechanisms has a piezo actuator, three hinge members, and a lever member with a notch hinge which operatively cooperates with the hinge members.
Claims9
An ultra-precision positioning system, comprising:
- a base;
- a motion stage movably provided above a top of the base;
- a first feeding means including a first actuator and first and second hinge elements with a circular hinge, the first feeding means performing an x-axis translational motion of the motion stage with respect to the base;
- a second feeding means including a second actuator and first and second hinge elements with a circular hinge, the second feeding means performing a y-axis translational motion and a z-axis rotational motion of the motion stage with respect to the base;
- a third feeding means including a third actuator and first and second hinge elements with a circular hinge, the third feeding means performing the y-axis translational motion and the z-axis rotational motion of the motion stage with respect to the base in cooperation with the second feeding means;
- a fourth feeding means including a fourth actuator, first and second hinge members with a circular hinge, a first lever member cooperating with the second hinge member, and a third hinge member cooperating with the first hinge member, the fourth feeding means performing an x-axis rotational motion of the motion stage with respect to the base;
- and
- a control means for controlling the first to fourth actuators of the first to fourth feeding means.
Dependencies are inferred from the claim text.