Pressure sensor assembly
AssigneeDelphi Technologies, Inc.
InventorsTimothy A. Vas, Timothy M. Betzner, Stephen P. Long
Life of this patent
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Abstract
A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.
Claims15
A sensor assembly comprising:
- a ceramic substrate;
- a container located on the ceramic substrate and having a flexible top surface configured to deflect under applied pressure, the container and the ceramic substrate defining a container volume;
- a sensor cell mounted on the substrate and located within the container, the sensor cell comprising a sensor handle wafer and a diaphragm located proximate the sensor handle wafer, the sensor cell defining a reference cavity;
- and
- a substantially incompressible liquid disposed within the container volume;
- wherein the ceramic substrate defines a port for introducing the substantially incompressible liquid into the container volume.
A pressure sensor arrangement comprising:
- a ceramic substrate;
- a container located on the ceramic substrate and having a flexible top surface configured to deflect under applied pressure and a boss formed on the top surface, the container and the ceramic substrate defining a container volume;
- a silicon pressure sensor handle wafer mounted on the ceramic substrate and located within the container;
- a silicon diaphragm located within the container volume and attached to the silicon pressure sensor handle wafer so as to define a reference cavity located between the silicon diaphragm and the silicon pressure sensor handle wafer;
- and
- oil disposed within the container volume;
- wherein the ceramic substrate defines a port for introducing the oil into the container volume.
Dependencies are inferred from the claim text.