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US 7,243,551 B2Granted
Micromechanical component having a sealed cavity and at least two dielectric layers and corresponding method for its manufacture
AssigneeRobert Bosch GmbH
InventorsFrank Fischer, Arnim Hoechst
Life of this patent
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Abstract
A micromechanical component having a substrate, a cavity formed in the substrate, a membrane provided on the surface of the substrate, which seals the cavity, the membrane having at least two layers between which one or several piezoelectric or piezoresistive circuit trace strip(s) is/are embedded, and a corresponding manufacturing method therefor.
Claims11
A micromechanical component comprising:
- a substrate;
- and
- a membrane provided on a surface of the substrate, the membrane having at least two dielectric layers between which at least one piezoelectric or piezoresistive circuit trace strip is embedded,
- wherein the substrate and the membrane are arranged to seal a cavity.
1 more element
Dependencies are inferred from the claim text.