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US 7,243,546 B2Granted
Acceleration sensor chip
AssigneeOki Electric Industry Co., Ltd.
InventorAkihiro Sakamoto
Life of this patent
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Abstract
An acceleration sensor chip has a frame portion having a frame body portion and protruding portions. The acceleration sensor chip also includes a mobile structure having a central weight portion supported movably by four beam portions. The mobile structure also has four rectangular parallelepiped-form protruding weight portions The acceleration sensor chip also includes a plurality of stoppers extending above the protruding weight portions.
Claims13
An acceleration sensor chip comprising:
- a frame portion having a frame body portion with a rectangular upper surface, and two protruding portions extending respectively from a central portion of each short side of said rectangular upper surface toward an opposite short side;
- four beam portions including two beam portions extending respectively from a central portion of each long side of said frame body portion toward an opposite long side, and two other beam portions extending respectively from two ends of said two protruding portions;
- and
- a mobile structure supported movably inside said frame body portion by said four beam portions, including a single rectangular parallelepiped-form central weight portion and four rectangular parallelepiped-form protruding weight portions connected respectively to four corner portions of said central weight portion, and being spaced from said frame portion and said beam portions.
1 more element
An acceleration sensor chip, comprising:
- a frame portion having a rectangular frame defined by two opposing long sides, and two opposing short sides which are shorter than the long sides, said frame portion further having two protruding portions, each protruding portion extending from a central portion of a respective short side of said rectangular frame toward an opposite short side, each protruding portion having a thickness;
- four beam portions, including two beam portions each extending from a central portion of a respective long side of said rectangular frame toward an opposite long side, and two other beam portions each extending from an end of a respective protruding portion so as to be co-linear therewith, said beam portions having a thickness that is less than the thickness of said protruding portions;
- and
- a mobile structure movably supported inside said rectangular frame by said four beam portions, and including a single rectangular parallelepiped-form central weight portion, and four rectangular parallelepiped-form protruding weight portions connected respectively to four corner portions of said central weight portion and which are all spaced by a gap from said frame portion and said beam portions.
1 more element
Dependencies are inferred from the claim text.