Method for manufacturing a probe card

A method for manufacturing a probe card, which comprises a contact provided on a base substrate and electrically coupled to a terminal of an electronic device, for receiving and/or sending a signal from and/or to said electronic device, comprising:

• a first contact formation step of forming a first contact on a first surface of a first sacrificial substrate, said first contact including a first end which is fixed to the first surface of the first sacrificial substrate and a second end which is freely held at the outside of the first sacrificial substrate in a direction parallel to the first surface of the first sacrificial substrate;
• a second contact formation step of forming a second contact on a first surface of a second sacrificial substrate, said second contact including a third end which is fixed to the first surface of the second sacrificial substrate and a fourth end which is freely held at the outside of the second sacrificial substrate in a direction parallel to the first surface of the second sacrificial substrate;
• a signal transmission line formation step of forming a signal transmission line in said base substrate;
• a first contact joining step of attaching said first surface of said first sacrificial substrate to said base substrate and joining said first contact to said signal transmission line;
• and
• a second contact joining step of attaching said first surface of said second sacrificial substrate to said base substrate and joining said second contact to said signal transmission line.