E-manufacturing in semiconductor and microelectronics processes
AssigneeRockwell Automation Technologies, Inc.
InventorsJames E. Morgenson, Michael A. Bush, Donald A. Smith, Karel Stryczek, Michael V. Wood
Life of this patent
Estimating the term…
Abstract
Architecture that facilitates management of a semiconductor and/or microelectronics manufacturing process. A manufacturing component in communication with the semiconductor and/or microelectronics process operates according to process conditions to output a product, which manufacturing component at least one of monitors and controls the process using modularized code. A rules engine component processes one or more rules in association with the modularized code to control the process conditions in realtime by balancing process efficiency criteria to arrive at an optimal result.
Claims34
A system that facilitates management of a semiconductor and/or microelectronics manufacturing process, comprising:
- a manufacturing component in communication with the semiconductor and/or microelectronics manufacturing process which operates according to conditions of the process, which manufacturing component at least one of monitors and controls the process using modularized code;
- a standards-based model employed to modularize control code into testable blocks such that higher order modules are built from tested, approved modules;
- and
- a rules engine component that processes one or more rules in association with the modularized code to affect conditions of the process in realtime.
A system that facilitates management of a manufacturing process, comprising:
- a manufacturing component in communication with a semiconductor and/or microelectronics manufacturing process which operates according to conditions of the process to output a product, which manufacturing component at least one of monitors and controls the process using modularized code;
- a standards-based model employed to modularize control code into testable blocks such that higher order modules are built upon tested and approved modules;
- and
- a rules engine component that processes one or more rules in association with the modularized code to control conditions of the process in realtime by balancing process efficiency criteria to arrive at an optimal result.
A method of managing a semiconductor and/or microelectronics manufacturing process, comprising:
- managing the semiconductor and/or microelectronics manufacturing process in accordance with modularized code that operates on conditions of the process;
- modularizing the code utilizing a standards-based model such that higher order modules are developed from tested and approved modules;
- and
- processing a rule set in cooperation with execution of the modularized code to control conditions of the process in realtime and output a product.
Dependencies are inferred from the claim text.