Electron microscope equipped with magnetic microprobe
AssigneesTohoku University, JEOL Ltd.
InventorsDaisuke Shindo, Yasukazu Murakami, Tetsuo Oikawa, Masao Inoue
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Abstract
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.
Claims7
An electron microscope equipped with a magnetic microprobe, the microscope creating an image of a specimen made of a magnetic material based on an electron beam transmitted through the specimen, said microscope comprising:
- a nonmagnetic holder for holding said specimen made of the magnetic material;
- said magnetic microprobe being made of a magnetic material, the microprobe having a needle-like tip;
- and
- a moving mechanism capable of moving said microprobe toward and away from said specimen and brought to a stop.
Dependencies are inferred from the claim text.