Method of fabricating a write element with a reduced yoke length
AssigneeWestern Digital (Fremont), LLC
InventorsLi He, Ming Zhao, Yining Hu
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Abstract
A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.
Claims41
A method of fabricating a write element comprising:
- forming a base layer including a bottom pole and an zero throat insulation layer disposed over the bottom pole;
- forming a cover insulation layer over at least a portion of the base layer;
- forming an anti-reflective coating layer over the cover layer;
- forming a mask layer including a coil opening over the anti-reflective coating layer;
- forming a coil layer comprising coil turns within the coil opening, the coil turns comprising a first coil turn disposed at least partially over the zero throat insulation layer;
- removing the mask layer to form a coil insulation opening;
- forming a coil insulation layer within the coil insulation opening;
- and
- forming a top layer over the coil layer.
A method of fabricating a write element comprising:
- forming a base layer including
- forming a bottom pole,
- forming an zero throat insulation layer over the bottom pole, and
- forming a P2 layer including a P2 pole and a P2 backgap over the bottom pole;
- forming a cover insulation layer over portions of the bottom pole and zero throat insulation layer disposed between the P2 pole and P2 backgap, and over sidewalls of the P2 pole and P2 backgap;
- forming an anti-reflective coating layer over the cover layer;
- forming a mask layer including a coil opening over the anti-reflective coating layer;
- forming a coil layer comprising coil turns within the coil opening, the coil turns comprising a first coil turn disposed at least partially over the zero throat insulation layer;
- removing the mask layer to form a coil insulation opening;
- forming a coil insulation layer within the coil insulation opening;
- and
- forming a top layer over the coil layer.
Dependencies are inferred from the claim text.