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US 7,236,848 B2Granted
Data representation relating to a non-sampled workpiece
AssigneeAdvanced Micro Devices, Inc.
InventorsSteven P. Reeves, Michael G. McIntyre
Life of this patent
Estimating the term…
Abstract
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.
Claims32
A method, comprising:
- receiving measured metrology data relating to a first workpiece;
- approximating metrology data corresponding to a second workpiece based upon said metrology data relating to said first workpiece to provide a projected metrology data relating to said second workpiece and
- determining an estimated level of accuracy relating to said projected metrology data corresponding to said second workpiece.
A method, comprising:
- performing a first process upon a first workpiece;
- acquiring metrology data relating to said first workpiece resulting from said first process;
- performing said first process upon a second workpiece;
- modeling a relationship between said first process and said metrology data relating to said first workpiece;
- and
- determining an estimated metrology data relating to said second workpiece resulting from said first process based upon said modeling of said relationship between said first process and said metrology data and
- determining an estimated level of accuracy relating to said estimated metrology data relating to said second workpiece.
4 more elements
A method, comprising:
- performing a process upon a plurality of workpieces;
- selecting a set of sampled workpieces from said plurality of workpieces;
- acquiring actual metrology data relating to said sampled workpieces;
- modeling a metrology data relationship between said plurality of workpieces and said acquired approximate metrology data for said process;
- generating projected metrology data relating to non-sampled workpieces based upon said modeled relationship;
- assigning said projected metrology data to said non-sampled workpieces and
- determining a confidence level relating to the accuracy associated with said projected metrology data relating to said non-sampled workpieces.
4 more elements
A method, comprising:
- performing a process upon a plurality of workpieces;
- selecting a set of sampled workpieces from said plurality of workpieces;
- acquiring actual metrology data relating to said sampled workpieces;
- modeling a metrology data relationship between said plurality of workpieces and said acquired metrology data for said process;
- generating a projected metrology data relating to non-sampled workpieces based upon said modeling;
- storing said projected metrology data relating to non-sampled workpieces and
- determining a statistical confidence level relating to the accuracy associated with said projected metrology data relating to said non-sampled workpieces.
4 more elements
A system, comprising:
- a plurality of workpieces;
- a metrology tool to acquire metrology data from a sample workpiece from said plurality of workpieces;
- a controller to approximate corresponding metrology data relating to at least one non-sampled workpiece from said plurality of workpieces based upon said metrology data relating to said sampled workpiece to provide a projected metrology data, said controller to determine an estimated level of accuracy relating to said approximated metrology data relating to said at least one non-sampled workpiece.
An apparatus, comprising:
- a controller to approximate corresponding metrology data relating to at least one non-sampled workpiece from plurality of processed plurality of workpieces based upon metrology data relating to said sampled workpiece to provide a projected metrology data, said controller to determine an estimated level of accuracy relating to said approximated metrology data relating to said at least one non-sampled workpiece.
An apparatus, comprising:
- means for receiving measured metrology data relating to a first workpiece;
- means for approximating metrology data corresponding to a second workpiece based upon said metrology data relating to said first workpiece to provide a projected metrology data relating to said second workpiece and
- means for determining a estimated level of accuracy of relating to said projected metrology data corresponding to said second workpiece.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
- receiving measured metrology data relating to a first workpiece;
- approximating metrology data corresponding to a second workpiece based upon said metrology data relating to said first workpiece to provide a projected metrology data relating to said second workpiece and
- determining a estimated level of accuracy relating to the said projected metrology data corresponding to said second workpiece.
Dependencies are inferred from the claim text.