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US 7,235,475 B2Granted
Semiconductor nanowire fluid sensor and method for fabricating the same
AssigneeHewlett-Packard Development Company, L.P.
InventorTheodore I. Kamins
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Abstract
Nanowire fluid sensors are provided. The fluid sensors comprise a first electrode, a second electrode, and at least one nanowire between the first electrode and the second electrode. Each nanowire is connected at a first end to the first electrode and at a second end to the second electrode. Methods of fabricating and operating the fluid sensor are also provided.
Claims16
A method of fabricating a fluid sensor, said method comprising:
- providing a substrate comprising a first electrode;
- forming at least one metal nanoparticle on said substrate;
- exposing said at least one metal nanoparticle to at least one gas containing a semiconductor for a period of time sufficient to grow a corresponding at least one nanowire of a first predetermined length;
- forming a layer of an etchable material on the substrate and surrounding said at least one nanowire;
- optionally thinning said layer of said etchable material to expose a top of said at least one nanowire, thereby providing said at least one nanowire with a second predetermined length that is less than said first predetermined length;
- depositing a layer of a metal on top of said layer of etchable material and patterning said layer of metal to form a second electrode;
- at least partially removing said layer of said etchable material, sufficient to expose at least one said nanowire.
4 more elements
A method of fabricating an array of fluid sensors, each fluid sensor sensitive to a specific species in a fluid being analyzed, each fluid sensor formed by the following steps:
- providing a substrate comprising a first electrode;
- forming at least one metal nanoparticle on said substrate;
- exposing said at least one metal nanoparticle to at least one gas containing a semiconductor for a period of time sufficient to grow a corresponding at least one nanowire of a first predetermined length;
- forming a layer of an etchable material on the substrate and surrounding said at least one nanowire;
- optionally thinning said layer of said etchable material to expose a top of said at least one nanowire, thereby providing said at least one nanowire with a second predetermined length that is less than said first predetermined length;
- depositing a layer of a metal on top of said layer of etchable material and patterning said layer of metal to form a second electrode;
- at least partially removing said layer of said etchable material, sufficient to expose at least one said nanowire,
- said method further comprising;
- providing said at least one nanowire of each said fluid sensor with a functional coating that is specific to sensing a specific species in said fluid, each fluid sensor thereby sensing a different species.
6 more elements
Dependencies are inferred from the claim text.