# US 7,235,162 B2 · Cathode for vacuum sputtering treatment machine

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- Number: US 7,235,162 B2
- Document ID: US7235162B2
- Status: Granted
- Kind: B2
- Application number: 11/032,378
- Filed: 2005-01-10
- Published: 2005-06-23
- Granted: 2007-06-26
- Earliest claimed: 2003-07-08
- Assignees: Tecmachine
- Inventors: Michel Aulagner; Lionel Labalme
- Web page: https://patentgrep.com/patent/US7235162B2

## CPC

- H01J 37/3435: {Target holders (includes backing plates and endblocks)}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A cathode for a vacuum sputtering processing machine includes a target plate mounted on a support having a cooler. The support is secured to a frame delimiting a closed space for positioning and centering the target. The frame peripherally has a profiled catching rim configured to collaborate with a set of independent gripping elements having complementary catching shapes configured to allow an effect of tilting of the elements resulting from a clamping action exerted on members engaged in a thickness of the elements, and bearing against a part of the catching rim of the frame, so that, under the tilting effect, a part of the catching shapes of the set of gripping elements bears facially against a peripheral edge of the target plate to secure the target plate.

## Claims

### Claim 1

Cathode for vacuum sputtering processing machine comprising a target plate mounted on a support comprising a cooler, the support is secured to a frame delimiting a closed space for positioning and centering the target plate wherein the frame peripherally has a profiled catching rim configured to collaborate with a set of independent gripping elements having complementary catching shapes configured to allow an effect of tilting of the elements resulting from a clamping action exerted on members engaged in a thickness of the elements, and bearing against a part of the catching rim of the frame, so that, under the tilting effect, a part of the catching shapes of the set of gripping elements bears facially against a peripheral edge of the target plate to secure the target plate.

### Claim 2 (depends on 1)

Cathode according to claim 1, wherein the set of gripping elements is suitably cut out to form, once they have been assembled side by side, a closed peripheral frame surrounding and completely enclosing the four sides of the target, thereby delimiting a free centered region for sputtering.

### Claim 3 (depends on 2)

Cathode according to claim 2, wherein a first plurality of the elements has at least one mitred edge to form corners and a second plurality of the elements is straight to allow each of the second plurality to be inserted by slipping between two receiving corners of the corners already positioned with respect to the frame.

### Claim 4 (depends on 1)

Cathode according to claim 1, wherein the members are set screws.

### Claim 5 (depends on 1)

Cathode according to claim 1, wherein the catching rim of the frame comprises an offset straight profile section delimiting a straight slot.

### Claim 6 (depends on 1)

Cathode according to claim 1, wherein the complementary catching shapes of the gripping elements consist of a straight flute collaborating with an offset straight profile section of the frame and delimiting a nib collaborating with the slot to give rise to the tilting effect under the clamping action.

### Claim 7 (depends on 1)

Cathode according to claim 1, wherein the support has a membrane.

### Claim 8 (depends on 1)

Cathode according to claim 1, wherein the support is mounted on a part of the machine, which is easily extractable.

### Claim 9 (depends on 8)

Cathode according to claim 8, wherein the part of the machine constitutes a door.

### Claim 10 (depends on 1)

Cathode according to claim 1, wherein the gripping elements comprise a same material or a different material as the sputtering target.

### Claim 11 (depends on 5)

Cathode according to claim 5, wherein the complementary catching shapes of the gripping elements consist of a straight flute collaborating with an offset straight profile section of the frame and delimiting a nib collaborating with the slot to give rise to the tilting effect under the clamping action.