Method and apparatus for depositing charge and/or nanoparticles
AssigneeRegents of the University of Minnesota
InventorsHeiko O. Jacobs, Chad Barry
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Abstract
A method and apparatus for use in depositing electrical charge and/or nanoparticles is provided. A stamping process is used in which a stamp having a flexible layer such as a flexible semiconductor layer applies a charge pattern on a substrate. Other techniques include lithographic patterning, the use of pre-patterned dissimilar materials, deposition by ions or radiation, the use of differing work functions, the use of liquid phase materials. Deposition monitoring techniques and apparatuses are also provided.
Claims25
A method of depositing nanoparticles on a substrate, comprising:
- obtaining a flexible stamp having a pattern formed thereon, the flexible stamp including a flexible overlayer of semiconductor material forming the pattern;
- applying the flexible stamp to the substrate to form a charge pattern on the substrate;
- and
- depositing nanoparticles on the charged pattern on the substrate.
A method of depositing nanoparticles on a substrate, comprising:
- covering a stamp substrate with a layer of material that is different from the stamp substrate;
- constructing a pattern in the top layer;
- applying the stamp substrate to the substrate to form a charge pattern on the substrate;
- depositing nanoparticles on the charge pattern on the substrate;
- and
- wherein depositing nanoparticles includes placing the substrate in a deposition chamber.
Dependencies are inferred from the claim text.