Pressure measuring system for vacuum chamber using ultrasonic wave

Abstract

Disclosed is a pressure measuring system for a vacuum chamber, in particular, a pressure measuring system for a vacuum chamber using ultrasonic wave. In this regard, there is provided a pressure measuring system for a vacuum chamber using ultrasonic wave, comprising a vacuum chamber 10 formed with desired vacuum at the inside thereof; ultrasonic wave-emitting means mounted close to an outer peripheral surface of the vacuum chamber 10 for emitting an ultrasonic wave 62 to the inside of the vacuum chamber 10; ultrasonic wave-receiving means for receiving a reflection wave 64 reflected after the striking of the ultrasonic wave 62 emitted from the ultrasonic wave-emitting means to the vacuum chamber; reflection wave-detecting means for detecting the reflection wave 64 from the ultrasonic wave-receiving means; and amplitude-analyzing means for analyzing the amplitude of the reflection wave 64 detected by the reflection wave-detecting means.

Dependencies are inferred from the claim text.