Architecture for general purpose programmable semiconductor processing system and methods therefor
AssigneeLam Research Corporation
InventorsRoger Patrick, Vincent Wong, Chung Ho Huang
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AssigneeLam Research Corporation
InventorsRoger Patrick, Vincent Wong, Chung Ho Huang
Estimating the term…
A method of optimizing a set of steps in a semi-conductor processing system comprising a software control program, wherein the semi-conductor processing system includes a first function, a second function, and a third function, and further includes a memory for storing a set of variables, and wherein the set of steps further includes a first step, a second step, and a third step. The invention includes generating the first step on an editor application, wherein the first function is added to the first step, and if required, a first set of user input instructions is added. The invention also includes generating the second step on the editor application, wherein the second function is added to the second step, and if required, a second set of user input instructions is added; and generating the third step on the editor application, wherein the third function is added to the third step, and if required, a third set of user input instructions is added. The invention further includes placing the first step, the second step, and the third step in a proper order; transferring the set of steps to the semi-conductor processing system; executing the set of steps; storing a set of results in the set of variables; and, if required, generating a report from the set of variables.
A method of automating a set of off-line tasks in a semi-conductor processing system, comprising:
A method of automating a set of off-line tasks in a plurality of semi-conductor processing systems, comprising:
Dependencies are inferred from the claim text.