Manufacturing procedure control method and system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorYuan-Li Liao
Life of this patent
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Abstract
A manufacturing procedure control method. The method executes tests during transport for object lots. The object lots are carried on a transport vehicle during transport. The object lots that pass the tests are loaded in a manufacturing tool. If a load port and a tag reader are provided on the transport vehicle, additional tests can be performed during transport of the object lots.
Claims27
A manufacturing procedure control method, comprising the steps of:
- executing at least one test during transport of at least one object lot, wherein the at least one object lot is carried on a carrier during transport, wherein the at least one test comprises a constraint check, an EQS process check, and a recipe comparison check;
- determining whether the at least one object lot has passed the at least one test;
- and
- if the at least one object lot has passed the at least one test, loading the at least one object lot in a manufacturing tool.
A machine-readable storage medium for storing a computer program providing a manufacturing procedure control method, the method comprising the steps of:
- executing at least one test during transport for at least one object lot, wherein the at least one object lot is carried on a carrier during transport, wherein the at least one test comprises a constraint check, an EQS process check, and a recipe comparison check;
- determining whether the at least one object lot has passed the at least one test;
- and
- if the at least one object lot has passed the at least one test, loading the at least one object lot in a manufacturing tool.
A manufacturing procedure control system, comprising:
- a test execution module, executing at least one test during transport of at least one object lot, wherein the at least one object lot is carried on a carrier during transport, wherein the at least one test comprises a constraint check, an EQS process check, and a recipe comparison check;
- a loading module, coupled to the test execution module and a manufacturing tool;
- and
- a processor determining whether the at least one object lot has passed the at least one test, and if so, directing the loading module to load the at least one object lot in the manufacturing tool.
Dependencies are inferred from the claim text.