Operational model for simulating manufacture flow and simulating method thereof
AssigneePowerchip Semiconductor Corp.
InventorsWay-Cheng Sung, Tung-Huang Tsai
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Abstract
The present invention discloses an operational model for simulating a manufacturing flow. The operational model includes an operational block, an operational library, a strategic block and a strategic library. The operational block is built in accordance with operational data of the equipments, and the operational library is built by integrating a plurality of operational blocks. The strategic block is built in accordance with throughput data of the equipments, and the strategic library is built by integrating a plurality of strategic blocks.
Claims15
A simulating method of manufacturing flow which is applied in a semiconductor foundry, the simulating method comprising:
- building a plurality of operational blocks in accordance with operational data of each manufacturing equipment;
- integrating the operational blocks and building at least one operational library;
- building a plurality of strategic blocks in accordance with throughput data of each manufacturing equipment;
- integrating the strategic blocks and building at least one strategic library;
- collecting data from the operational library and strategic library and building a operational model;
- and
- performing manufacturing flow simulation in accordance with the operational model.
An operational model simulating the manufacturing flow of a semiconductor foundry, the operational model comprising:
- an operational library including a plurality of operational blocks built in accordance with each operational data of each manufacturing equipment;
- and
- a strategic library including a plurality of strategic blocks built in accordance with each throughout data of each manufacturing equipment.
Dependencies are inferred from the claim text.