Method and apparatus for sorting particles with a MEMS device
AssigneeInnovative Micro Technology
InventorsJohn S. Foster, John C. Harley, Steven H. Hovey, Richard T. Martin, Hung D. Nguyen, Paul J. Rubel
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Abstract
A micromechanical particle sorting chip uses laser light directed through at least one of a reflective and refractive surface to come to a focus in an optically transparent layer. The laser light impinges on a particle of interest, causing it to fluoresce. Upon detecting the fluorescence, a micromemchanical actuator is activated, which directs the particle of interest into one of a plurality of possible exit paths.
Claims20
A micromechanical particle sorting chip, comprising:
- at least one fluid channel defined in an optically transparent layer formed over a substrate;
- at least one of a reflective surface and a refractive surface formed in the optically transparent layer, which focuses light to a focal point within the fluid channel;
- and
- at least one micromechanical actuator defined on the substrate, disposed to direct a particle of interest from a fluid stream at a point downstream of the focal point within the fluid channel, into one of a plurality of possible exit paths located in the substrate.
A method of manufacturing a micromechanical particle sorting chip, comprising:
- forming at least one fluid channel in an optically transparent layer formed over a substrate;
- forming at least one of a reflective surface and a refractive surface in the optically transparent layer, which focuses light to a focal point within the fluid channel;
- and
- forming at least one micromechanical actuator defined on the substrate, disposed to direct a particle of interest from a fluid stream at a point downstream of the focal point within the fluid channel, into one of a plurality of possible exit paths located in the substrate.
A method for sorting a particle of interest from a fluid sample, comprising:
- applying a fluid sample to a fluid channel defined in an optically transparent layer formed over a micromechanical particle sorting chip;
- applying laser light through at least one of a reflective and a refractive surface formed in the optically transparent layer, and directing the laser light to a focus at a detection slit in the fluid channel;
- detecting a fluorescence signal generated by the particle of interest emitted through the detection slit;
- actuating a micromechanical actuator located on the micromechanical particle sorting chip and disposed adjacent to the optically transparent layer to direct the particle of interest into one of a plurality of possible exit paths located in the sorting chip.
Dependencies are inferred from the claim text.