Layered structures for optical reflectors
AssigneeLockheed Martin Corporation
InventorsChang Wei, Barry Lee-Mean Yang, Yiqun Pan
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Abstract
Device of layered structures for optical reflectors and method for making the device. A device for providing environmental stability and mechanical integrity in space includes a substrate and a first silicon oxynitride layer on the substrate. The first silicon oxynitride layer has a tensile stress. Additionally, the device includes a second silicon oxynitride layer on the first silicon oxynitride layer. The second silicon oxynitride layer has a compressive stress.
Claims19
A device for providing environmental stability and mechanical integrity in space, the device comprising:
- a substrate;
- a first silicon oxynitride layer on the substrate, the first silicon oxynitride layer having an overall tensile stress in a range from 0.01 MPa to 1 MPa;
- a second silicon oxynitride layer on the first silicon oxynitride layer, the second silicon oxynitride layer having an overall compressive stress.
A device for providing environmental stability and mechanical integrity in space, the device comprising:
- a substrate;
- a silicon oxynitride coating layer on the substrate, the silicon oxynitride coating layer having a changing stress, the changing stress being overall compressive on a top surface of the silicon oxynitride coating layer and overall tensile on a bottom surface of the silicon oxynitride coating layer,
- wherein the silicone oxynitride coating layer comprises at least a first coating sub-layer and a second coating sub-layer, the second coating sub-layer on the first coating sub-layer, the second coating sub-layer having the compressive stress, the first coating sub-layer having the tensile stress,
- wherein the first coating sub-layer has a first thickness ranging from 5 microns to 35 microns.
Dependencies are inferred from the claim text.