Acousto-optic device and fabrication method of acousto-optic device
AssigneeFujitsu Limited
InventorsHiroshi Miyata, Yukito Tsunoda, Tadao Nakazawa
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Abstract
An acousto-optic device is disclosed which can achieve both of suppression of secular change and prevention of device damage and can maintain a stabilized wavelength selection filtering operation. The acousto-optic device includes a substrate on which a SAW guide for guiding a surface acoustic wave and an optical waveguide for guiding an optical wave are provided. A pyro-electricity coping conductive wiring pattern is provided in a region of the substrate other than the SAW guide and neutralizes polarization charge generated on a surface of the substrate.
Claims13
An acousto-optic device, comprising:
- a substrate on which a surface acoustic wave propagation region for guiding a surface acoustic wave and an optical waveguide for guiding an optical wave are provided;
- and
- a conductive neutralization wiring pattern provided in a region of said substrate other than said surface acoustic wave propagation region, wherein said conductive neutralization wiring pattern comprises a first and second pattern which are electrically connected to each other and formed on an upper or rear surface of said substrate in such a manner that the first and second pattern sandwich in said surface acoustic wave propagation region from both sides with respect to a direction substantially perpendicular to a guiding direction of said optical wave.
An acousto-optic device having a substrate on which an elastic surface-wave propagation region for guiding an elastic surface-wave and an optical waveguide for guiding an optical wave, comprising:
- a conductive neutralization wiring pattern provided in a region of said substrate other than said elastic surface-wave propagation region, wherein said conductive neutralization wiring pattern comprises a first and second pattern which are electrically connected to each other and formed on an upper or rear surface of said substrate in such a manner that the first and second pattern sandwich in said surface acoustic wave propagation region from both sides with respect to a direction substantially perpendicular to a guiding direction of said optical wave.
Dependencies are inferred from the claim text.