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US 7,214,958 B2Granted
Phase change memory cell with high read margin at low power operation
AssigneeInfineon Technologies AG
InventorThomas Happ
Life of this patent
Estimating the term…
Abstract
A memory cell device includes a first electrode, phase-change material adjacent the first electrode, a second electrode adjacent the phase-change material, a diffusion barrier adjacent the phase-change material, and isolation material adjacent the diffusion barrier for thermally isolating the phase-change material. The diffusion barrier prevents diffusion of the phase-change material into the isolation material.
Claims10
A memory cell device comprising:
- a first electrode;
- phase-change material adjacent the first electrode;
- a second electrode adjacent the phase-change material;
- a diffusion barrier adjacent the phase-change material;
- and
- isolation material adjacent the diffusion barrier for thermally isolating the phase-change material,
- wherein the diffusion barrier prevents diffusion of the phase-change material into the isolation materia1,
- wherein the isolation material comprises a dielectric material that limits the heat leakage from the phase change material, and
- wherein the dielectric material comprises a porous oxide film having a thermal conductivity between 0.1 and 0.8 W/mk.
6 more elements
A memory cell device comprising:
- a first electrode;
- phase-change material adjacent the first electrode;
- a second electrode adjacent the phase-change material;
- isolation material for thermally isolating the phase-change material;
- and
- a diffusion barrier for preventing diffusion of the phase-change material into the isolation material,
- wherein the isolation material comprises a dielectric porous oxide film having a thermal conductivity between 0.1 and 0.8 W/mk.
4 more elements
Dependencies are inferred from the claim text.