Interferometer calibration methods and apparatus
AssigneeHewlett-Packard Development Company, L.P.
InventorsAndrew L. Van Brocklin, Eric T. Martin
Life of this patent
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Abstract
A Fabry-Perot (FP) interferometer includes substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces. The FP interferometer also has a mechanism for controlling the optical gap. The mechanism includes a plurality of electrostatic control plates. Each electrostatic control plate has a fixed control-plate area. Each control plate is adapted to control the optical gap by application of a control-plate voltage. The control-plate areas are related by integral ratios.
Claims7
A Fabry-Perot interferometer, comprising:
- a) substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces;
- and
- b) means for controlling the optical gap, including a plurality of electrostatic control plates, each electrostatic control plate having a fixed control-plate area and each control plate being adapted to control the optical gap by application of a control-plate voltage, the control-plate areas being related by integral ratios.
Dependencies are inferred from the claim text.