Method and apparatus for personalization of semiconductor
AssigneeMicronic Laser Systems AB
InventorTorbjorn Sandstrom
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Abstract
A system for making small modifications to the pattern in standard processed semiconductor devices. The modifications are made to create a small variable part of the pattern against a large constant part of the same pattern. In a preferred embodiment the exposure of the variable and constant parts are done with the same wavelength in the same combined stepper and code-writer. The invention devices a way of writing variable parts of the chip that is automatic, inexpensive and risk-free. A system for automatic design and production of die-unique patterns is also shown.
Claims17
A method for exposing a microelectronic device comprising the steps of:
- exposing at least one layer of said microelectronic device by using projection of a mask or a reticle for forming a first subpattern;
- and
- exposing the same at least one layer of said microelectronic device by using stored coding information for forming a second subpattern;
- wherein
- said first subpattern is constant between at least two dies in said at least one layer of said microelectronic device,
- said second subpattern is variable between said at least two dies, and
- said second subpattern is defined by stored code data that is unique for said microelectronic device.
A device for exposing a microelectronic device, the device comprising:
- a first exposure unit for exposing at least one layer of said microelectronic device by using the projection of a mask or a reticle for forming a first subpattern;
- and
- a second exposure unit for exposing the same at least one layer of said microelectronic device by using stored coding information for forming a second subpattern;
- wherein
- said first subpattern is constant between at least two dies in said at least one layer of said microelectronic device,
- said second subpattern is variable between said at least two dies, and
- said second subpattern is defined by stored code data that is unique for said microelectronic device.
Dependencies are inferred from the claim text.