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US 7,210,351 B2Granted
Micro accelerometer
AssigneesChung-Shan Institute of Science and Technology, Neostones Micro Fabrication Corporation
InventorsYuan Lo, Kye-Chyn Ho, Lung-Yung Lin, Deng-Horng Tsai, Schiu Sche
Life of this patent
Estimating the term…
Abstract
A micro accelerometer including a plurality of proof masses is provided to detect the acceleration of the first axis, the second axis and the third axis. The disclosed micro accelerometer has the advantages of close loop control, mechanical decoupling, and not relying on high aspect ratio manufacturing technology.
Claims36
A micro accelerometer comprising:
- a first proof mass;
- a second proof mass and a third proof mass arranged at each of the two opposite sides of the first proof mass connected to the first proof mass by two flexible supporters and having a plurality of slots formed thereon, wherein the second proof mass and the third proof mass move along a first axial direction parallel to the first proof mass;
- and
- a plurality of electrode plate sets arranged relative to the second proof mass and the third proof mass respectively, for forming a plurality of sets of sensing electrodes of the first axial direction together with the second proof mass and the third proof mass, wherein the sensing electrodes are configured in differential circuits.
1 more element
A micro accelerometer comprising:
- a first proof mass moving in the axial direction vertical to the first proof mass;
- a second proof mass and a third proof mass arranged at each of the two opposite sides of the first proof mass, connected to the first proof mass by two flexible supporters and having a plurality of slots formed thereon, wherein the second proof mass and the third proof mass move along a first axial direction parallel to the first proof mass;
- a lower electrode arranged relative to the first proof mass for forming a sensing capacitor together with the first proof mass;
- and
- a plurality of electrode plate sets arranged relative to the second proof mass and the third proof mass respectively, for forming a plurality of sets of sensing electrodes of the first axial direction together with the second proof mass and the third proof mass, wherein the sensing electrodes are configured in differential circuits.
2 more elements
A micro accelerometer comprising:
- a first proof mass;
- a second proof mass and a third proof mass arranged at each of the two opposite sides of the first proof mass, connected to the first proof mass by two flexible supporters and having a plurality of slots formed thereon, wherein the second proof mass and the third proof mass move along a first axial direction parallel to the first proof mass;
- a fourth proof mass and a fifth proof mass arranged at each of the two opposite sides of the first proof mass, connected to the first proof mass by two flexible supporters and having a plurality of slots formed thereon, wherein the fourth proof mass and the fifth proof mass move along a second axial direction parallel to the first proof mass;
- a plurality of electrode plate sets arranged relative to the second proof mass, the third proof mass, the fourth proof mass and the fifth proof mass respectively, for forming a plurality of sets of sensing electrodes of the first axial direction together with the second proof mass and the third proof mass and forming a plurality of sets of sensing electrodes of the second axial direction together with the fourth proof mass and the fifth proof mass, wherein the sensing electrodes are configured in differential circuits.
1 more element
A micro accelerometer comprising:
- a first proof mass moving in the axial direction vertical to the first proof mass;
- a second proof mass and a third proof mass arranged at each of the two opposite sides of the first proof mass, connected to the first proof mass by two flexible supporters and having a plurality of slots formed thereon, wherein the second proof mass and the third proof mass move along a first axial direction parallel to the first proof mass;
- a fourth proof mass and a fifth proof mass arranged at each of the two opposite sides of the first proof mass, connected to the first proof mass by two flexible supporters and having a plurality of slots formed thereon, wherein the fourth proof mass and the fifth proof mass move along a second axial direction parallel to the first proof mass;
- a lower electrode arranged relative to the first proof mass for forming a sensing capacitor together with the first proof mass;
- and
- a plurality of electrode plate sets arranged relative to the second proof mass, the third proof mass, the fourth proof mass and the fifth proof mass respectively, for forming a plurality of sets of sensing electrodes of the first axial direction together with the second proof mass and the third proof mass and forming a plurality of sets of sensing electrodes of the second axial direction together with the fourth proof mass and the fifth proof mass, wherein the sensing electrodes are configured in differential circuits.
3 more elements
Dependencies are inferred from the claim text.