Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode
AssigneeSamsung Electronics Co., Ltd.
InventorsJai-kwang Shin, Seong-gu Kim, Young-kyou Park, Hyeon-ill Um
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Abstract
An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.
Claims16
A method for manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode, comprising:
- (a) forming a basic RMIM electrode by placing a cylinder-shaped magnet at a center of a magnet unit and arranging a plurality of ring-shaped magnets to surround the cylinder-shaped magnet;
- (b) deducing places where a horizontal magnetic field component is concentrated by off-axis rotating the basic RMIM electrode;
- and
- (c) optimizing the configuration of the basic RMIM electrode by modifying at least one of a shape and an arrangement of at least one of the magnets so that the horizontal magnetic field component is evenly distributed.
Dependencies are inferred from the claim text.