System and method for acquiring semiconductor process status information

A system for acquiring semiconductor process status information, comprising:

• an equipment server for outputting a start command according to a HSMS protocol;
• a computer system server connected to the equipment server for converting the start command from the HSMS protocol to a RS232 protocol and outputting the converted command;
• a protocol converter connected to the computer system server for converting the start command from the RS232 protocol to a RS485 protocol and outputting the converted command;
• an AD/DA module connected to the protocol converter for converting the start command from the RS485 command to an analog signal and outputting the converted command;
• an external sensor connected to the AD/DA module for acquiring semiconductor process status information as initiated by the start command;
• wherein the AD/DA module converts the semiconductor process status information from analog signals to the RS485 protocol and outputs the converted information to the protocol converter;
• the protocol converter converts the semiconductor process status information from the RS485 protocol to the RS232 protocol and outputs the converted information to the computer system server;
• and the computer system server outputs the semiconductor process status information to the equipment server.

A method for acquiring semiconductor process status information, comprising the steps of:

• a tool application program outputting a start command according to a HSMS protocol;
• converting the start command from the HSMS protocol to a RS232 protocol and outputting the converted start command;
• converting the start command from the RS232 protocol to a RS485 protocol and outputting the converted command according to the RS485 protocol;
• converting the start command from the RS485 protocol to an analog signal and outputting the converted command;
• activation of an external sensor by the start command;
• acquiring semiconductor process status information from the external sensor;
• converting the semiconductor process status information from analog signals to the RS485 protocol and outputting the converted information according to the RS485 protocol;
• converting the semiconductor process status information from the RS485 protocol to the RS232 protocol and outputting the converted information according to the RS232 protocol;
• converting the semiconductor process status information from the RS232 protocol to the HSMS protocol;
• and
• outputting the semiconductor process status information to an equipment server according to the HSMS protocol.