Method and apparatus for dynamic adjustment of an active sensor list
AssigneeAdvanced Micro Devices, Inc.
InventorMatthew S. Ryskoski
Life of this patent
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Abstract
The present invention provides a method and apparatus for dynamic adjustment of an active sensor list. The method includes providing an active sensor list indicative of at least one sensor associated with at least one processing tool, the at least one sensor being communicatively coupled to a network having an associated bandwidth, receiving information indicative of a state of at least one of the processing tools, and modifying the active sensor list based on the information indicative of the state of the at least one of the processing tools and the associated network bandwidth.
Claims30
A method, comprising:
- providing an active sensor list indicative of at least one sensor associated with at least one processing tool, the at least one sensor being communicatively coupled to a network having an associated bandwidth;
- receiving information indicative of a state of at least one of the processing tools;
- and
- modifying the active sensor list based on the information indicative of the state of the at least one of the processing tools and the associated network bandwidth.
A manufacturing system, comprising:
- means for providing an active sensor list indicative of at least one sensor associated with at least one processing tool, the at least one sensor being communicatively coupled to a network having an associated bandwidth;
- means for receiving information indicative of a state of at least one of the processing tools;
- and
- means for modifying the active sensor list based on the information indicative of the state of the at least one of the processing tools and the associated network bandwidth.
A manufacturing system, comprising:
- a network having an associated bandwidth;
- at least one sensor communicatively coupled to the network, the sensor configured to provide tool trace data associated with a processing tool via the network;
- a controller configured to:
- provide an active sensor list indicative of at least one of the sensors coupled to the network;
- receive information indicative of a state of at least one of the processing tools;
- and
- modify the active sensor list based on the information indicative of the state of the at least one of the processing tools and the associated network bandwidth.
A method, comprising:
- providing an active sensor list indicative of at least one sensor associated with at least one processing tool, the at least one sensor being communicatively coupled to a network having an associated bandwidth;
- receiving information indicative of a state of at least one of the processing tools;
- removing at least one sensor from the active sensor list based on the information indicative of the state of the at least one of the processing tools and the associated network bandwidth;
- and
- adding at least one sensor to the active sensor list based on the information indicative of the state of the at least one of the processing tools and the associated network bandwidth.
Dependencies are inferred from the claim text.