Apparatus and method for determining the minimum zone for an array of features with a true position tolerance
AssigneeIntel Corporation
InventorsAnatoly Filatov, Robert J. Guderian, Eugene Tuv
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorsAnatoly Filatov, Robert J. Guderian, Eugene Tuv
Estimating the term…
A method and apparatus for determining the minimum zone for an array of features with a true position tolerance. In one embodiment, a target function is defined according to a deviation value of each of at least two features from an array of features having a maximum deviation between an actual position and a nominal position. Once defined, the target function is minimized to determine a rotation parameter, a horizontal translation parameter and a vertical translation parameter that provide a minimum target function value as a minimum of the maximum deviation for the array of features. In one embodiment, an inspection report may be generated for the array of features, including at least the minimum, maximum deviation value, as well as the rotation parameter, the horizontal translation parameter and the vertical translation parameter that provide the minimum target function value. Other embodiments are described and claimed.
A method comprising:
An article of manufacture having a machine accessible medium having associated data wherein the data, when accessed, results in a machine performing:
A system comprising:
Dependencies are inferred from the claim text.