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US 7,194,197 B1Granted
Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
AssigneeGlobal Solar Energy, Inc.
InventorsRobert G. Wendt, Scott Wiedeman, Jeffrey S. Britt, Douglas G. Mason
Life of this patent
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Abstract
A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible.
Claims31
A physical vapor deposition effusion system, comprising:
- a device configured to translate a strip material through a physical vapor deposition zone and along a processing path in a deposition chamber, each of the strip material and the physical vapor deposition zone having a width oriented perpendicular to the processing path and a length oriented parallel to the processing path;
- and
- first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel containing a heated quantity of a different source material, the first and second vessels being configured to concurrently emit the different source materials and produce overlapping plumes of the different source materials in the physical vapor deposition zone in the same deposition chamber, each vessel including an array of vapor delivery nozzles distributed uniformly across the vessel in a direction corresponding to the width of the physical vapor deposition zone and configured to expel overlapping plumes of source material, so that a fog of source materials is created and deposited on the strip material in the deposition zone, the fog having a substantially uniform composition across the width of the physical vapor deposition zone and a varying composition across the length of the physical vapor deposition zone.
A physical vapor deposition system, comprising:
- a roll assembly configured to translate a strip material through a physical vapor deposition zone and along a processing path in a deposition chamber, each of the strip material and the physical vapor deposition zone having a width oriented perpendicular to the processing path, and a length oriented parallel to the processing path;
- first and second crucibles arranged serially along the processing path to concurrently emit a different source material and produce overlapping plumes of different source materials in the same deposition chamber, each crucible having a lid;
- each crucible having at least one nozzle in the lid to pass vapor evaporated from molten source material contained in the crucible;
- and
- each crucible having a source material heating system to control the temperature of the source material at a desired temperature range;
- wherein the roll assembly is configured to maintain a substantially constant travel speed of the strip material through the physical vapor deposition zone in relation to the temperature of source material in the crucible, such that source material of substantially uniform flux is created and deposited on the strip material.
3 more elements
Dependencies are inferred from the claim text.