Fabrication method of transparent electrode on visible light-emitting diode
AssigneeEpitech Technology Corporation
InventorsTse-Liang Ying, Shi-Ming Chen
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Abstract
A method for forming a transparent electrode on a visible light-emitting diode is described. A visible light-emitting diode element is provided, and the visible light-emitting diode element has a substrate, an epitaxial structure and a metal electrode. The metal electrode and the epitaxial structure are located on the same side of the substrate, or located respectively on the different sides of the substrate. An ohmic metal layer is formed on a surface of the epitaxial structure. The ohmic metal layer is annealed. The ohmic metal layer is removed to expose the surface of the epitaxial structure. A transparent electrode layer is formed on the exposed surface. A metal pad is formed on the transparent electrode layer.
Claims11
A method for fabricating a transparent electrode of a visible LED, comprising:
- providing a visible LED element, comprising a substrate, an epitaxial structure, and a metal electrode, wherein the metal electrode and the epitaxial structure are formed on opposite sides of the substrate;
- forming an ohmic metal layer over a surface of the epitaxial structure;
- thermal annealing the ohmic metal layer;
- removing the ohmic metal layer to expose the surface of the epitaxial structure that is contact with the entire ohmic metal layer;
- forming a transparent electrode layer over the surface of the epitaxial structure;
- and
- forming a metal pad over the transparent electrode layer.
Dependencies are inferred from the claim text.