Method of inspecting substrate processing apparatus, and storage medium storing inspection program for executing the method
AssigneeTokyo Electron Limited
InventorsAkira Obi, Hiroshi Nakamura
Life of this patent
Estimating the term…
Abstract
A method of inspecting a substrate processing apparatus that enables a reduction in operator labor time to be achieved. A host computer instructs a substrate processing apparatus to prohibit transfer of a product wafer into the substrate processing apparatus during a period of cleaning the substrate processing apparatus. The substrate processing apparatus notifies the host computer of a number and types of inspection wafers to be used in inspections for predetermined inspection items. The host computer notifies the substrate processing apparatus that preparation of the inspection wafers has been completed.
Claims9
A method of inspecting a substrate processing apparatus that communicates with an external controller and executes inspections for predetermined inspection items, the inspection method comprising:
- a prohibit product substrate transfer instruction step of the external controller instructing the substrate processing apparatus to prohibit transfer of a product substrate into the substrate processing apparatus during a period of cleaning the substrate processing apparatus;
- an inspection substrate notification step of the substrate processing apparatus notifying the external controller of a number and types of inspection substrates to be used in the inspections for the predetermined inspection items;
- and
- an inspection substrate preparation complete notification step of the external controller notifying the substrate processing apparatus that preparation of the inspection substrates has been completed.
A method of inspecting a substrate processing apparatus that communicates with an external controller and executes inspections for predetermined inspection items, the inspection method comprising:
- a prohibit product substrate transfer step of the substrate processing apparatus prohibiting transfer of a product substrate into the substrate processing apparatus in response to an input to the substrate processing apparatus;
- an inspection substrate notification step of the substrate processing apparatus notifying the external controller of a number and types of inspection substrates to be used in the inspections for the predetermined inspection items;
- and
- an inspection substrate preparation complete notification step of the external controller notifying the substrate processing apparatus that preparation of the inspection substrates has been completed.
A computer-readable storage medium storing an inspection program for causing a computer to execute a method of inspecting a substrate processing apparatus that communicates with an external controller and executes inspections for predetermined inspection items, the program comprising:
- a prohibit product substrate transfer instruction module for the external controller instructing the substrate processing apparatus to prohibit transfer of a product substrate into the substrate processing apparatus during a period of cleaning the substrate processing apparatus;
- an inspection substrate notification module for the substrate processing apparatus notifying the external controller of a number and types of inspection substrates to be used in the inspections for the predetermined inspection items;
- and
- an inspection substrate preparation complete notification module for the external controller notifying the substrate processing apparatus that preparation of the inspection substrates has been completed.
A computer-readable storage medium storing an inspection program for causing a computer to execute a method of inspecting a substrate processing apparatus that communicates with an external controller and executes inspections for predetermined inspection items, the program comprising:
- a prohibit product substrate transfer notification module for the substrate processing apparatus notifying the external controller of prohibition of transfer of a product substrate into the substrate processing apparatus in response to an input to the substrate processing apparatus;
- an inspection substrate notification module for the substrate processing apparatus notifying the external controller of a number and types of inspection substrates to be used in the inspections for the predetermined inspection items;
- and
- an inspection substrate preparation complete notification module for the external controller notifying the substrate processing apparatus that preparation of the inspection substrates has been completed.
Dependencies are inferred from the claim text.