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US 7,189,430 B2Granted
Directed assembly of highly-organized carbon nanotube architectures
AssigneeRensselaer Polytechnic Institute
InventorsPulickel M. Ajayan, Ramanath Ganapathiraman, Anyuan Cao
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Abstract
A method of controllably aligning carbon nanotubes to a template structure to fabricate a variety of carbon nanotube containing structures and devices having desired characteristics is provided. The method allows simultaneous, selective growth of both vertically and horizontally controllably aligned nanotubes on the template structure but not on a substrate in a single process step.
Claims24
A method of making carbon nanotubes, comprising:
- providing a substrate containing a plurality of oxide template structures having at least a portion covered by a masking material;
- providing a nanotube source gas onto the plurality of oxide template structures;
- and
- selectively growing the carbon nanotubes on an exposed portion of each of the oxide template structures but not on exposed portions of the substrate and not on portions of the oxide template structures covered by the masking material;
- wherein the step of selectively growing the carbon nanotubes comprises simultaneously growing carbon nanotubes of a different length by providing the nanotube source gas for a sufficient time to allow the carbon nanotubes growing on the exposed portion of each oxide template structure to contact the masking material covering the covered portion of an adjacent template structure.
2 more elements
A method of making carbon nanotubes, comprising:
- providing a substrate containing an oxide template structure having at least a portion covered by a masking material;
- providing a nanotube source gas onto the template structure;
- and
- selectively growing the carbon nanotubes on an exposed portion of the oxide template structure but not on exposed portions of the substrate;
- wherein the step of selectively growing the carbon nanotubes comprises simultaneously growing the carbon nanotubes of a first length on an exposed portion of the template structure and growing nanotubes of a second length less than the first length on the masking material.
2 more elements
Dependencies are inferred from the claim text.