Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program
AssigneeASML Netherlands B.V.
InventorsNorbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee, Roel Boumen, Henricus Petrus Johannus Van Lierop, Robert Jozef Dumont, Jacobus Eelkman Rooda
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Abstract
A method of planning tasks to be performed in a machine derives a precedence graph by linking subsidiary tasks to a sequence of key tasks to create a scheduling problem that can be solved by an automated scheduler.
Claims34
A method of planning and performing tasks in a machine, the machine being at least a sub-system of a lithographic apparatus or lithographic processing cell, the method comprising:
- receiving an order for work to be carried out by the machine;
- determining key tasks to be carried out to fulfill the order;
- generating a key task sequence comprising the key tasks;
- determining subsidiary tasks, including one or more logistic tasks, one or more pre-processing tasks and/or one or more post-processing tasks, to be carried out before or after each of the key tasks;
- generating a scheduling problem instance comprising the subsidiary tasks linked to respective ones of the key tasks;
- and perform work by the machine.
A supervisory control system configured to control a machine, the machine being at least a sub-system of a lithographic apparatus or a lithographic processing cell, the control system comprising:
- an input device configured to receive an order for work to be carried out by the machine;
- a key task determining mechanism configured to determine key tasks to be carried out to fulfill the order;
- a task sequence generator configured to generate a key task sequence comprising the key tasks;
- a subsidiary task determining mechanism configured to determine subsidiary tasks, including one or more logistic tasks, one or more pre-processing tasks and/or one or more post-processing tasks, to be carried out before or after each of the key tasks;
- and
- a scheduling problem instance generator configured to generate a scheduling problem instance comprising the subsidiary tasks linked to respective ones of the key tasks;
- and at least one resource configured to execute the generated scheduling problem instance.
A computer readable medium containing computer-executable instructions configured to control a machine, the machine being at least a part of a lithographic apparatus or a lithographic processing cell, wherein the computer-executable instructions are configured to instruct a computer system to perform a method, the method comprising:
- receiving an order for work to be carried out by the machine;
- determining key tasks to be carried out to fulfill the order;
- generating a key task sequence comprising the key tasks;
- determining subsidiary tasks, including one or more logistics tasks, one or more pre-processing tasks and/or one or more post-processing tasks, to be carried out before or after each of the key tasks;
- generating a scheduling problem instance comprising the subsidiary tasks linked to respective ones of the key tasks;
- and executing the generated scheduling problem instance.
Dependencies are inferred from the claim text.