Thermal control system and method
AssigneeAdvanced Thermal Sciences Corp.
InventorsKenneth W. Cowans, William W. Cowans, Glenn W. Zubillaga, Isaac Millan
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AssigneeAdvanced Thermal Sciences Corp.
InventorsKenneth W. Cowans, William W. Cowans, Glenn W. Zubillaga, Isaac Millan
Estimating the term…
A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.
A method of controlling the temperature of a thermal load by utilizing a vaporizable fluid comprising the steps of:
A method of controlling the temperature of process equipment with internally flowing fluid comprising the steps of:
The method of controlling the temperature of a process tool with a fluid comprising the steps of:
The method of exchanging thermal energy between a vaporizable fluid and a process unit of variable thermal load whose temperature is to be controlled, comprising the steps of:
A method of using a refrigerant as a direct heat exchange medium for controlling the temperature of a controlled unit with which it is in thermal contact comprising the steps of:
Dependencies are inferred from the claim text.