Liquid dispensing system
AssigneeAdvanced Technology Materials, Inc.
InventorKevin T. O'Dougherty
Life of this patent
Estimating the term…
Loading patent…
AssigneeAdvanced Technology Materials, Inc.
InventorKevin T. O'Dougherty
Estimating the term…
A system for dispensing liquid to a manufacturing process from a container including an outer container and a flexible inner container occupied by the liquid. A flow passage provides fluid communication between an interior of the inner container and the manufacturing process. A pressurized fluid source is in fluid communication with a space between inner walls of the outer container and the inner container. The pressurized fluid source causes fluid under pressure to flow into the space between the inner walls of the outer container and the inner container to force liquid out of the inner container to the manufacturing process via the flow passage. A pressure sensor is positioned to sense pressure in the flow passage. A controller responsive to the pressure sensor controls the pressure in the flow passage by modulating the pressure from the pressurized fluid source.
A system for dispensing liquid to a manufacturing process from a container including an outer container and an inner container, the inner container made of a flexible material and occupied by the liquid, the system comprising:
A method of dispensing liquid to a manufacturing process from a container including an outer container and a flexible inner container, the flexible inner container containing the liquid, the method comprising:
A liquid handling system comprising:
Dependencies are inferred from the claim text.