Controlling a material processing tool and performance data

A process performance control system for controlling a process tool comprising:

• a process performance controller capable of being coupled to said process tool, said process performance controller comprises a process performance prediction model configured to receive tool data from a plurality of sensors associated with said process tool and predict process performance data based on said tool data, a process recipe correction filter configured to receive predicted process performance data from said process performance prediction model and determine a process recipe correction based on said predicted process performance data and a known value of the process recipe parameter to be corrected, said known value being measured from a preceding process run, and a process controller configured to update a process recipe for said process tool using said process recipe correction.

A material process system comprising:

• a process tool;
• and
• means for controlling said process tool, said means for controlling comprising means for predicting process performance data using tool data received from a plurality of sensors associated with said process tool, means for determining a process recipe correction using the predicted process performance data and a known value of the process recipe parameter to be corrected, the known value being measured from a preceding process run, and means for updating a process recipe for said process tool using said process recipe correction.