High-efficiency neutron detectors and methods of making same
AssigneeThe Regents of the University of Michigan
InventorsDouglas S. McGregor, Raymond Klann
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AssigneeThe Regents of the University of Michigan
InventorsDouglas S. McGregor, Raymond Klann
Estimating the term…
Neutron detectors, advanced detector process techniques and advanced compound film designs have greatly increased neutron-detection efficiency. One embodiment of the detectors utilizes a semiconductor wafer with a matrix of spaced cavities filled with one or more types of neutron reactive material such as 10B or 6LiF. The cavities are etched into both the front and back surfaces of the device such that the cavities from one side surround the cavities from the other side. The cavities may be etched via holes or etched slots or trenches. In another embodiment, the cavities are different-sized and the smaller cavities extend into the wafer from the lower surfaces of the larger cavities. In a third embodiment, multiple layers of different neutron-responsive material are formed on one or more sides of the wafer. The new devices operate at room temperature, are compact, rugged, and reliable in design.
Apparatus for efficiently detecting neutrons, the apparatus comprising:
Apparatus for efficiently detecting neutrons, the apparatus comprising:
Apparatus for efficiently detecting neutrons, the apparatus comprising:
Apparatus for efficiently detecting neutrons, the apparatus comprising:
A method of making a high-efficiency neutron detector, the method comprising:
A method of making a high-efficiency neutron detector, the method including providing a particle-detecting first substrate having a first surface and a plurality of cavities extending into the substrate from the first surface, and filling the plurality of cavities with a neutron-responsive material, the material being responsive to neutrons absorbed thereby for releasing ionizing radiation reaction products, wherein the neutron-responsive material disposed in the cavities at the first surface increases neutron-detection efficiency by increasing the likelihood that the reaction products will be directed into the substrate for increased neutron-detection efficiency, the improvement comprising:
Dependencies are inferred from the claim text.