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US 7,149,374 B2Granted
Fiber optic pressure sensor
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsNicholas Lagakos, Joseph A. Bucaro, Jacek Jarzynski
Life of this patent
Estimating the term…
Abstract
A fiber optic pressure sensor includes an optical fiber for transmitting light. The optical fiber has an axis. The fiber optic pressure sensor also includes an etched diaphragm perpendicular to the axis. The diaphragm includes an operative side located at a distance from the optical fiber sufficient to reflect a portion of the transmitted light into the optical fiber. The etched diaphragm includes a semiconductor, a dielectric, and/or a metal.
Claims56
An apparatus comprising:
- an optical fiber for transmitting light, said optical fiber comprising an axis;
- and
- a semiconductor diaphragm perpendicular to said axis, said diaphragm comprising an operative side located at a distance from said optical fiber sufficient to reflect a portion of the transmitted light into said optical fiber, said diaphragm comprising an exposed side opposite to said operative side, and
- a protective lave adjacent to said exposed side and, in combination with said diaphragm, defining a cavity, said protective layer defining at least one hole.
1 more element
An apparatus comprising:
- a transmitting optical fiber for transmitting light, said transmitting optical fiber comprising a transmitting end having a transmitting axis;
- at least one receiving optical fiber comprising a receiving end having a receiving axis;
- and
- a semiconductor diaphragm perpendicular to said transmitting axis and said receiving axis, and located at a distance from said optical fiber sufficient to reflect a portion of the light from said transmitting end to said receiving end, said diaphragm comprising an exposed side opposite to said operative side, and
- a protective layer adjacent to said exposed side and, in combination with said diaphragm, defining a cavity, said protective layer defining at least one hole.
2 more elements
An apparatus comprising:
- a transmitting optical fiber for transmitting light, said transmitting optical fiber comprising a transmitting end having a transmitting axis;
- at least one receiving optical fiber comprising a receiving end having a receiving axis parallel to said transmitting axis;
- and
- a semiconductor diaphragm located at a distance from said optical fiber sufficient to reflect a portion of the light from said transmitting end to said receiving end, said diaphragm comprising an exposed side opposite to said operative side, and
- a protective layer adjacent to said exposed side and, in combination with said diaphragm, defining a cavity, said protective layer defining at least one hole.
2 more elements
An apparatus comprising:
- an optical fiber for transmitting light, said optical fiber comprising an axis;
- and
- a diaphragm perpendicular to said axis, said diaphragm comprising an operative side located at a distance from said optical fiber sufficient to reflect a portion of the transmitted light into said optical fiber, said diaphragm comprising an exposed side opposite to said operative side, and
- a protective layer adjacent to said exposed side and, in combination with said diaphragm, defining a cavity, said protective layer defining at least one hole.
1 more element
An apparatus comprising:
- a transmitting optical fiber for transmitting light, said transmitting optical fiber comprising a transmitting end having a transmitting axis;
- at least one receiving optical fiber comprising a receiving end having a receiving axis;
- and
- a diaphragm perpendicular to said transmitting axis and said receiving axis, and located at a distance from said optical fiber sufficient to reflect a portion of the light from said transmitting end to said receiving end, said diaphragm comprising an exposed side opposite to said operative side, and
- a protective layer adjacent to said exposed side and, in combination with said diaphragm, defining a cavity, said protective layer defining at least one hole.
2 more elements
An apparatus comprising:
- a transmitting optical fiber for transmitting light, said transmitting optical fiber comprising a transmitting end having a transmitting axis;
- at least one receiving optical fiber comprising a receiving end having a receiving axis parallel to said transmitting axis;
- and
- a diaphragm located at a distance from said optical fiber sufficient to relied a portion of the light from said transmitting end to said receiving end, wherein said etched diaphragm comprises a semiconductor, a dielectric, and a metal, said diaphragm comprising an exposed side opposite to said operative side, and
- a protective layer adjacent to said exposed side and, in combination with said diaphragm, defining a cavity, said protective layer defining at least one hole.
2 more elements
Dependencies are inferred from the claim text.