Controller and method to mediate data collection from smart sensors for fab applications

A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

• identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to reduce data sensed from one or more semiconductor manufacturing devices, based on the context descriptions;
• recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;
• transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context;
• and
• receiving from the particular smart sensors reduced data sensed by the smart sensors, responsive to the transmitted current context.

A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

• identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to calibrate their sensing of data from one or more semiconductor manufacturing devices, based on the context descriptions;
• recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;
• transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context;
• and
• receiving from the particular smart sensors data, sensed by the smart sensors, calibrated responsive to the transmitted current context.

A controller adapted to monitoring processes or equipment performance in a semiconductor manufacturing operation, the controller including:

• a processor;
• memory coupled to the processor;
• one or more ports coupled to the processor, adapted to communicate with smart sensors;
• and
• logic and resources operable with the processor, adapted to
• identify a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;
• recognize a current context of operation of a particular semiconductor manufacturing device;
• transmit to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context;
• and
• receive from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context.

A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

• receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
• analyzing at the controller the reduced data, responsive to the current context, and determining that additional detail should be requested;
• and
• transmitting a request for the additional detail from the data sensed by at least one specific smart sensor.

A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:

• a processor;
• memory coupled to the processor;
• one or more ports coupled to the processor, adapted to communicate with smart sensors;
• and
• logic and resources operable with the processor, adapted to
• receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
• analyze the reduced data, responsive to the current context, and determine that additional detail should be requested;
• and
• transmit to at least one specific smart sensor a request for the additional detail from the data sensed.

A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

• receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
• providing a data user at least some of the reduced data and receiving from the data user an inquiry for additional detail;
• and
• transmitting to at least one specific smart sensor a request for the additional detail from the data sensed.

A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:

• a processor;
• memory coupled to the processor;
• one or more ports coupled to the processor, adapted to communicate with smart sensors and a data user;
• and
• logic and resources operable with the processor, adapted to
• receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;
• provide the data user at least some of the reduced data and receive from the data user an inquiry for additional detail;
• and
• transmit to at least one specific smart sensor a request for the additional detail from the data sensed.

A controller-aided method of controlling equipment performance monitoring in a semiconductor manufacturing operation, the method including:

• identifying to a controller capabilities of at least one smart sensor that is adapted
• to recognize a plurality of context descriptions;
• and
• to adapt its sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions;
• receiving at the smart sensor from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor;
• and
• transmitting to the controller data sensed by the smart sensor, responsive to the received current context.

A smart sensor adapted to monitoring equipment performance in a semiconductor manufacturing operation, the smart sensor including:

• a processor;
• memory coupled to the processor;
• one or more ports coupled to the processor, adapted to communicate with at least one controller;
• and
• logic and resources operable with the processor, adapted to
• recognize a plurality of context descriptions and to adapt the smart sensors sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions;
• receive from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor;
• and
• transmit to the controller data sensed by the smart sensor, responsive to the received current context.