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US 7,144,629 B2Granted
Electrostatic-erasing abrasion-proof coating and method for forming the same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKenji Itoh
Life of this patent
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Abstract
An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
Claims28
A coating formed on a ceramic surface comprising:
- an external surface region having an amorphous structure;
- and
- a second region between the external surface region and the ceramic surface, said second region having a lower hardness than said external surface region,
- wherein said external surface region comprises carbon, and hydrogen.
1 more element
A coating formed on a ceramic surface comprising:
- an external surface region having an amorphous structure;
- and
- a second region between the external surface region and the ceramic surface, said second region having a lower resistivity than said external surface region,
- wherein said external surface region comprises carbon, and hydrogen.
1 more element
An article comprising:
- a substrate having a ceramic surface;
- and
- a coating formed on a ceramic surface, said coating including an external surface region having an amorphous structure and a second region between the external surface region and the ceramic surface, said second region having a lower hardness than said external surface region,
- wherein said external surface region comprises carbon and hydrogen.
1 more element
An article comprising:
- a substrate having a ceramic surface;
- and
- a coating formed on a ceramic surface said coating including an external surface region having an amorphous structure and a second region between the external surface region and the ceramic surface, said second region having a lower resistivity than said external surface region,
- wherein said external surface region comprises carbon and hydrogen.
1 more element
Dependencies are inferred from the claim text.