Method and apparatus for preparing chemical solutions
AssigneeFujitsu Limited
InventorsMasataka Fukuizumi, Toru Matoba, Hiroshi Osuda
Life of this patent
Estimating the term…
Abstract
A chemical solution preparation apparatus for preparing a chemical solution from chemical gas of an industrial chemical grade. A dissolution unit dissolves the chemical gas in pure water, which is contained in a tank. A gas discharge control unit controls the amount of chemical gas discharged from the dissolution unit. A liquid discharge discharges a predetermined amount of the chemical solution from the tank. At least one of the gas discharge control unit and the liquid discharge control unit are operated at substantially the same time as the dissolution unit.
Claims27
A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including:
- a preparation tank for storing the liquid;
- a first pipe for supplying the chemical gas into the preparation tank;
- a first valve arranged in the first pipe for opening and closing the first pipe;
- a second pipe for discharging the chemical gas that was not dissolved in the liquid during the gas dissolving from the preparation tank;
- a second valve arranged in the second pipe for opening and closing the second pipe;
- a third pipe connected to the preparation tank for draining a predetermined amount of the chemical solution out of the chemical solution preparation apparatus during the gas dissolving to increase the purity of the chemical solution;
- a third valve arranged in the third pipe for opening and closing the third pipe;
- and
- a controller for operating the first, second and third valves, wherein, when the controller is programmed to operate the first valve so as to supply the chemical gas to the preparation tank, the controller is programmed to operate the second valve and the third valve so as to simultaneously discharge an adjusted amount of the undissolved chemical gas and a predetermined amount of the chemical solution that is under preparation from the preparation tank.
A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including:
- a preparation tank for storing the liquid;
- a gas supply line for supplying the chemical gas to the preparation tank;
- a liquid supply line for supplying the liquid to the preparation tank;
- a first valve arranged in the gas supply line for opening and closing the gas supply line;
- a bubbler element connected to the gas supply line for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid;
- a second pipe for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank;
- a second valve arranged in the second pipe for opening and closing the second pipe;
- a third pipe for discharging a predetermined amount of the chemical solution from the preparation tank;
- a third valve arranged in the third pipe for opening and closing the third pipe;
- a controller for simultaneously operating the first, second and third valves;
- and
- a cooling unit for cooling the liquid in the preparation tank, wherein the cooling unit includes a pump for circulating the chemical solution between the preparation tank and a second pipe and a cooling element connected to the second pipe.
A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including:
- a preparation tank for storing the liquid;
- a gas supply line for supplying the chemical gas to the preparation tank;
- a liquid supply line for supplying the liquid to the preparation tank;
- a first valve arranged in the gas supply line for opening and closing the gas supply line;
- a bubbler element connected to the gas supply line for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid;
- a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank;
- a second valve arranged in the gas discharge line for opening and closing the gas discharge line;
- a chemical solution discharge line for discharging a predetermined amount of the chemical solution from the preparation tank;
- a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line;
- a cooling unit for cooling the liquid in the preparation tank, wherein the cooling unit includes a cooling element connected to the preparation tank and a pump for circulating the chemical solution between the preparation tank and the cooling element.
A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including:
- a preparation tank for storing the liquid;
- a gas supply line for supplying the chemical gas to the preparation tank;
- a liquid supply line for supplying the liquid to the preparation tank;
- a first valve arranged in the gas supply line for opening and closing the gas supply line;
- for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid;
- a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank;
- a second valve arranged in the gas discharge line for opening and closing the gas discharge line;
- a chemical solution discharge line for discharging a predetermined amount of the chemical solution from the preparation tank;
- a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line;
- a controller for simultaneously operating the first, second and third valves;
- a cooling unit for cooling the liquid in the preparation tank;
- and
- a gas cylinder containing liquefied chemical gas, wherein the cooling unit includes a heat exchanger for exchanging heat between the gas cylinder and the preparation tank.
A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including:
- a preparation tank for storing the liquid;
- a gas supply line for supplying the chemical gas to the preparation tank;
- a liquid supply line for supplying the liquid to the preparation tank;
- a first valve arranged in the gas supply line for opening and closing the gas supply line;
- a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank;
- a second valve arranged in the gas discharge line for opening and closing the gas discharge line;
- a chemical solution discharge line for discharging a predetermined amount of the chemical solution from the preparation tank;
- a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line;
- a concentration measuring device for measuring the concentration of the chemical solution, wherein the concentration measuring device includes at least one of a viscosity meter, a specific gravity meter, an ultrasonic wave velocity meter, and a specific conductance meter;
- and
- a concentration adjusting device for adjusting the concentration of the chemical solution in accordance with the measured result of the concentration measuring device, wherein the concentration adjusting device includes a controller for calculating the concentration of the chemical solution from the measured result of the concentration measuring device and controlling the amount of the chemical gas supplied to the preparation tank from the gas supply line in accordance with the calculated concentration, and wherein when the controller operates the first valve to supply the chemical gas to the preparation tank, the controller operates the second valve and the third valve to discharge an adjusted amount of the undissolved chemical gas and a predetermined amount of the chemical solution that is under preparation from the preparation tank.
A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including:
- a gas supply line for supplying the chemical gas;
- a first valve arranged in the gas supply line for opening and closing the gas supply line;
- a cooling unit connected to the gas supply line for storing and cooling the liquid during the preparation of the chemical solution;
- a tank for storing the chemical solution received from the cooling unit;
- a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid during the gas dissolving from the cooling unit;
- a second valve arranged in the gas discharge line for opening and closing the gas discharge line;
- a chemical solution discharge line connected to the tank for draining a predetermined amount of the chemical solution out of the chemical solution preparation apparatus during the gas dissolving;
- and
- a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line;
- and
- a controller for operating the first, second and third valves, wherein, when the controller operates the first valve so as to supply the chemical gas to the preparation tank, the controller operates the second valve and the third valve so as to simultaneously discharge an adjusted amount of the undissolved chemical gas from the cooling unit, and to discharge a predetermined amount of the chemical solution from the tank.
Dependencies are inferred from the claim text.